Process Control Plan

Process Control Plan Module Etch

Product: Factory Location:

Operation

Operation

Responsible

Reference

Parameter

Meas.

Number

Name

Engineer

Document

Name

Units

© TLC, 2003

Definitions: Name of the operation process step or machine

Operation number or step

Reference document where process controls Primary Engineer are defined responsible for design and deployment of process controls for that operation

Units of the parameter Name of the parameter(s) being controlled Temp, time, width, etc.

© TLC, 2003

(X/Y)

Clear

Requires Eng.

Lines of

Machine

Functional

Type of

Specification

support for

Defense

Alarm Limits

CTQ*

Indicator

Limits?

for moves?

(types of control)

(X Only)

Machine alarms Machine controls, all products Recipe/machine control Technology control Machine controls, all products Recipe/machine control Technology control Machine alarms Machine controls, all products Recipe/machine control Technology control Machine controls Recipe/machine control Technology control

Engineering Type of indicator, product (Y) or process (X) *Critical to Quality. Link parameter to product performance. Answer "why are we controlling this parameter?"

Upper or

support is not required to disposition or move lots (Y/N) Specifications are clearly communicated to the floor for disposition of product (Y/N)

Lower alarm limits

Machine Alarms: operational limits within the machine can run Machine controls/all products: allows the floor to monitor and control performance across all units produced on each machine Recipe/Machine control: allows the floor to monitor recipes per machine to determine if additional adjustments are required for each recipe Technology control: allows the Engineer to monitor performance across all machines by technology or recipe

Date:

2/7/2003

Control

Active Control

Chart

Control

Rules*

Type*

Limits

(1-5)

Type X-bar R X-bar s Individuals Delta to target z UWMA

(n) OCAP

Upper or

OCAP

lower control limits

is defined and approved (Y/N)

Measurement

Sample

Sample

Process

Frequency

Size

Sigma

How Frequency of data collection.

Active Rules 1. One point beyond limits 2. 6 increasing or decreasing 3. 8 in a row above or below CL 4. 2 out of 3 beyond zone A 5. 4 out of 5 beyond zone B Specify if using only one sided criteria

many samples are taken per subgroup?

What is the baseline process standard deviation a typical high volume product.

Cpk

Current Cpk Use a high volume product with the tightest spec.

Variation 1 SME

One standard deviation of measurement error from a gage study

Measurement Reference

Control &

Database

Status

Standard

OCAP

(Y/N)

Date

Reference standard available (Y/N)

Notes:

Data Measurement control is used to monitor and control gage bias and repeatability

stored in database (Y/N)

10/14/2008 10/14/2008 Completed

Date to start activity Activity Started, Date to complete activity