Mems Companies

MEMS Links This page provides a comprehensive and updated set of links to MEMS related utilities, interview and historical recounts, companies, emerging companies, research organizations, and products. For some companies, you can find most updated news items pertaining to them.

MEMS Insight (collection of personal opinions and interviews) Bosch sees huge potential in tiny MEMS (August 01, 2007) Link. pdf archive of the article Bosch sensor engineering VP Horst Münzel and Bosch Sensortec general manager and CEO Frank Melzer recounted the history of MEMS development at Bosch and shared its plans for the technology in a conversation with EE Times. Interview with Larry Hornbeck of Texas Instruments DerNewsService EETimes EETimesAsia aggregate archive MEMS pioneer draws up technology's course (August 16, 2007) Link MEMS past,present,future Interviews with Dr. Kurt Petersen, who played a pioneering role in commercialization of MEMS technology. Interview with InvenSense Founder Steve Nasiri 2009/Partner with design company PDF backup Ink Jet technology: past, present, and future Link Yole technology interviews Rich Duncombe, Distinguished Technologist of the Imaging and Printing Group of Hewlett-Packard. The future of Pico Projector Link An interview with the President and Head of R&D of Opus Microsystems, a Taiwanese MEMS design company established in 2004. MEMS Market size estimates Smart phone market $115b estimate MEMS microphone market $1b in 2013 estimate MEMS industralization history before Nova Sensors, a story by Art Zias, Allsensors.com Link

MEMS Technology Companies Large companies or companies with many products Texas Instruments Company MEMS division History of DLP development lightCrafter Hewlett Packard ink jet printers Technology an HP inkjet cartridge teardown pdf archive General Electric Global Research Corporate link Micro/Nano Sector (include link taken inside the cleanroom) History Honeywell Corporate Microelectronics and sensors Robert Bosch (~$450M/year, 2008) Company Research and Technology Center Sensors division history geomagnetic sensors Sensonor Technologies (Norway) Link Motion, pressure and accelerometers since

1965 ASM Sensor (Chicago area) Freescale Semiconductors Company Sensor division Xtrinsic pressure sensor NXP Semiconductors (Nasdaq: NXPI), a Eindhoven, Netherland based european company with $3.9B revenue, Company sensor division ppt intro Kulite - Leader in pressure transducer technology Link Technology TRW Automotive Electronics Group Link Wikipedia and tech milestones Sensirion AG, Switzerland, specializes in humidity sensor, pressure sensor, and flow sensor Link ultra-low flow rate sensor PCB Piezotronics, Link Measurement Specialities (Nasdaq:MEAS) Link OEM manufacturer of sensors Silicon Microstructures Inc (SMI), Link Murata manufacturing Co., Ltd., Link Sanmina-SCI, electronic and mechanical products, Link FOGALEnanotech, French company with products in capacitive, optical, and ultrasound sensors, Link Companies primarily in the motion sensing space Analog Devices (~$100M/year) Company MEMS division Analog Dialog, a forum for exchange Article on Gyro and Motion STMicroelectronics Company Wikipedia Description MEMS/sensor division News 3/25/2011 InvenSense Company InvenSense Youtube Channel Planning IPO for $75M Colibrys Link News MEMSIC, accelerometers and wireless motes, IMUs, and vertical gyro $18M sales in Q32011 Home Endevco, accelerometers, Link pdf reference library about motion sensors Systron Donner Inertial Division (SDI) Link Bosch (see above) ROHM Kionix, a company started by Cornell faculty in 1993 . Acquired by ROHM on Nov 13, 2009. Link Link to parent company ROHM 3/25/2011 Denso, Japanese automotive parts (~$200M/year, 2008) Link Sensata Technologies, (NYSE: ST)Multinational automotive safety products, started in Germany formerly TI Sensors (~ $140M/year, 2008) Link Investor Info History Infineon Technologies, A German company with global imprint on many challenging areas (~$130M/year, 2008). Spun off Siemens in 1999. Link Wikipedia Schneider Electric, a French Company, a global expert on energy management (~$100M/year, 2008) Link Company History Sensors Wiki VTI, a Finland company focusing on automotive and sensors (~$80M/year, 2008) Link Asian Distributor QuadRep 3/17/2011 3/24/2011 acquired by Murata on 10/11/2011 Panasonic Industrial Works, supplier of automation, electronics, and lighting (~$70M/year, 2008) Link Delphi, leading global supplier of electronics and technologies for automobiles (~ $70M/year, 2008) Link Sumitomo Precision Products, Silicon Sensing Systems Link MEMS division MEMS division 2 SensorDynamics, Austria, wireless motion sensor products, acquired by Maxim (Nasdaq: MXIM) on July 18, 2011 for $160M, Link

Sitronix, Taiwan. Link Epson Toyocom, Japan, QMEMS process Epson Electronics America (EEA) IMU sensor Link Epson Microsystems Epson Electronics America Pirelli Cyber Tyer Link Moog Crossbow. Crossbow's 2010 revenue was 13 million dollars. It was acquired by Moog (Nasdaq: MOG.A) in July 2011. New link Qualtre, headquartered in Marlborough, MA, USA, venture backed SAW motion sensor, founded in 2008, Link Silicon Designs, military rugged capacitive sensors, Issaquah, WA, founded in 1983, Link DyTran Instruments, Inc, Link Acacia MEMTech, (Nasdaq:ACTG) Acacia Link VectorNav Technologies, LLC, embedded navigation solutions Link Goodrich, a Fortune 500 global supplier of system and services, Link News related to IMU shipment 2012 development in Minnesota MiraMEMS, China, link QST, Quality Sensor Tehcnologies, China, gyros Link started 2012 Biospace Cephied bioassay Home technology news Abbott i-Stat wholeblood analysis Site CardioMEMS, a startup from Georgia Tech Company Article background ISSYS Integrated Sensing Systems Company Omron Micro Device division, Pressure sensors, thermal sensors for human presence, company industrial automation sensors History Microprobe, a company specializing in neural implant devices,also entering probe card market to compete with Formfactor, Link Microvisk technologies, developer of handheld system to monitor the blood clotting status of patients Company Fraunhofer IPMS, MEMS laser microscope, Link Axion Biosystems, multielectrode recording, Link Experimetria, pre-clinical trial research company, Link Miscellaneous Asian and European Companies SONY Semiconductor Link Toshiba Corporate Research and Development Link Hitachi MEMS and Hitachi Display Link Article News Mitsubishi MEMSCAP company 2Q revenue $3.7M Q2 2012 profit=0.7million euro Lingsen precision industries, Taiwan Link News Acoustic sensor space Analysis 2 Knowles electronics, acoustic sensors, gaming joysticks for portable devices, Home MEMS Knowles lead MEMS Microphone suppliers Akustica (purchased by Bosch in 2010) Link to news Sonion Link News Analog Devices sold Microphone Business Line (MBL) to InvenSense Nov 2013 1, 2, Wolfson Microelectronics (Edinburgh, UK) Link BSE, Best Sound Electronics, Korea, websiteelectrete microphone design of BSE Infineon All around German company with power IC, micro controller, sensors IC,

and almost everything. website 英飞凌 HOSIDEN, Japan, website Suzhou MEMSensing 苏州敏芯 Microsystems Link NEOMEMS, 无锡芯奥微传感公司 website Shenzhen AAC Acoustic Technologies Company website Link AAC vs. Knowles Patent 1 2 3 Shandong Weifang Goer Acoustic Technology Link 歌尔声学 Listed on China Shenzhen Stock Exchange 002241 since 2008 analysis1Goer vs Knowles Patent2 Product listing on digikey speakerknowles microphone on DigikeySTMicroelectronics microphones on digikeyInvenSense Microphones on Digikeyvs. Panasonic Electret Microphones Companies and technologies related to printers, print heads, e-paper, display, and optics: Wikipedia link Qualcomm Mirasol display Group page Video Kyobo, Korea's largest bookseller, uses Mirasol-display technology, Nov 22, 2011 Koobe collaboration Bambook Pixtronix Link Story Collaborating with Chimei Innolux Pixel Qi Link is a spin off of One Laptop Per Child Plastic Logic Link manufacturers polymer-based organic electronics E-Ink Corporation Link Supplier of low power display to Amazon Kindle Hewlett Packard Flexible Display technology Link Liquivista, electrowetting display Link Organic LED Display Taiwan ITRI Silicon Light Machine and Grating Light Valve (GLV) technology SLM GLV Keynote photonics, a developer of solutions, tools and processors for photonics applications using MEMS Company FLIR, leader in thermal imaging Link Sofradir, a B2B company headquarterd in France (since 1986). It develops infrared (IR) and wave detectors for military applications. Link ULIS, infrared sensor manufacturer, Link Pyreos, Edinburgh, Infrared technology, Link DiCon Fiberoptics and MEMS, secure switching unit, Link Santec Corporation, manufacturer of high speed swept laser for medical applications, MEMS scanner Link MEMSCAP Link Boston Micromachines Corporation, deformable mirrors Link Wavien, low cost pocket projector Lemoptix, LSCAN micromirror device Link Optilux liquid lens for smart phones and tablets Link related:smart contact lens MicroVision, portable display device maker (Nasdaq:MVIS). Link Boston Micromachines, Adaptive optics, deformable mirrors. Link IMEC, Belgium, a company that focuses on nanoelectronics, including micro mirror arrays Link Fujifilm Dimatix, maker of large format ink jet printing Company link 3/25/2011 Eastman Kodak 3/25/2011

poLight AS, reflowable autofocus actuated lenses for camera phones, TLens, series B funding $18.5M in July 2011 Link Tessera Siimple MEMS autofocus lens Link 2Q revenue $70M Tessera is traded on Nasdaq under TERA.(TSRA) Chsistie, maker of 3D cinema projector Link Vuzix, video eyewear maker, Rochester, NY, Link Panorama Synergy, Magneto-optics devices, Link Kaiam, MEMS optics integration technology, Link Communications and electronics space - RF switch, discrete tunable elements, resonators, filters, acoustic wave resonators Avago Technologies, Link, Acoustic FBAR (film bulk acoustic resonator) filters (shipment news 1 2), analysis acquired Infineon AG's BAW business in 2008. Agilent, FBAR filter and duplexer News WiSpry, developer of MEMS RF capacitors, tunable filters, duplexers, and RF switches Link Analysis XCOM Wiress MEMS relays Link Dust Networks (smart dust sensors) Company History SiTimes resonator Company 3/25/2011 ships 50Millionth unit around June 2011 Discera (resonator) Company Shinsegi Communications Systems (oscillator) Korea, Company Siward, Taiwan, MEMS quartz oscillator Silicon Laboratories (Nasdaq: SLAB), which acquired Silicon Clocks and SpectraLinear, both in timing solution Company EE Time Article Jan/2011* Sand9, precision timing products for wireless applications Link raised $3.1M in Nov 2011 Ecliptek, founded in 1987, oscillators Link Cavendish Kinetics, a fabless semiconductor manufacturer in RF tuning products Link RF Micro Devices, cellular RF components, Link Enpirion, DC-DC power convertor chip with integrated core magnet, Link, Started in 2001 from Bell Labs, Enpirion bought by Altera for $140M in May 2013. Wireless modules: Mccdaq, MC Measurement and Computing, Link Companies in the energy and materials space MicroGen Systems LLC, energy harvestors link mPhase technologies, nanobattery technology, link MicroPelt, thin film cooler technology, Link Small companies/relatively new start-ups/Products covering emerging markets (private held companies) MEMScubemonolithic MEMS Senodia, Chinese maker of gyro Link Collaborating with X-Fab on a variety of projects Fluidigm, developer of microfluid platforms Link Veeco MEMS Probes Link Nanoink MEMS Probes Other companies in the scanning probe space K-Tek (Korea), Micro2Nano.com Formfactor (Nasdaq:FORM), making of probe cards Link Q32011 revenue=$52M,

net profit $6-9M. (reference: Microprobe) MEMjet, maker of large format ink printing head Link MOVEA SA, maker of motion sensing applications, including the Gyration mouse and airmouse app Link Company News Link Hillcrest Labs, Motion sensing remote, software, Link NovAtel, SPAN GNSS/Inertial Systems, Link InterSense, motion sensing technology, Link Global Navigation Satellite Systems, GNSS XSens, motion tracking, Link Baolab, Spain, NanoEMS platform, motion sensing, magnetic sensing, packaging, Link Audio Pixels (AKP:ASX), Australia, MEMS digital speakers, collaboration with SONY and others Link Bluechiip Limited (ASX ticker: BCT), a company specializing in wireless tracking solutions that monitors temperature of objects Link Melexis NV (MELE: Euronext), Belgium, a company specializing in microelectronics integrated sensors such as pressure sensors, claiming to help cars become greener LinkWikipedia Telecardia, MEMS based pH sensors Link BlockMEMS, a Mass company affiliated with Block Engineering. Link to news MicroSense LLC, high resolution capacitive position sensors, Link Applied Research Institutions CEA LETI (France) Link Alchimer, provider of advanced deposition technology Link A*STAR IME (Institute of Microelectronics, Agency for Science, Technology and Research) Link Singapore ASTAR ITRI, Taiwan (Industrial Technology Research Institute), Link Microelectronics Innovation Collaboration Center (C2MI), Quebec, Canada, Link Collaboration Innovation Center, Carnegie Mellon University Link Fraunhofer IPMS, a custom research institute for microelectronics and MEMS Link 苏州纳米所 SINANO research MEMS line Circuit/component Players Maxim Integrated Products, analog and mixed signal IC Link Cypress, Link touch sensor EPCOS AG, a German maker of electronics components, including MEMS barometric pressure sensor Link Wikipedia Altera, developer of packaging solutions for circuits Link MEMS Consultants A.M. Fitzgerald, Link Nanoshift, Link SystemPlus consulting, France, MEMS cost consulting, Link Equipment makers Plasma-therm Link Applied Materials , Link MEMS division KLA-Tencor, Link EV Group (EVG), headquartered in Austria, founded in 1980. Specializes in double

side alignment products and specialties wafers and processes. Link Oxford Instruments, Link Xactix (XeF2 etcher), Link Primaxx (dry etch release) Link Tegal, Japan an innovator of specialized production equipment including DRIE, Tegal ProNova, etc (maker of DRIE equipment) Link Link Finetech (bonding, assembly) Link SUSS MicroTec AG, founded as Karl Suss in 1949, headquartered in Munich Germany, coater, 3D integration, bonding, nanoimprint Link Sumitomo Precision Products, SPP, maker of etching, deposition, thermal processing equipment, Link EV Group, headquartered in Austria, with presence in US and Asia, lithography, bonding, advanced packaging, Link Brewer Science, bonding, wafer handling, lithography tools, anti-reflection, etc Link MEMSStar, UK, special equipment including surface treatment and zenon difluoride etching Link $20M order in 2010 Tousimis, Supercritical carbon dioxide dryer maker Link Xaxtix, Zenon difluoride etcher maker Link Lumera Laser for pico second laser processing Link E M Optomechanical, EMOpto, maker of 3D MEMS profiler Link SPP Process Technology Systems (SPTS), a supplier of capital equipment and process technology, maker of APS etch system Link Omega APS etch system OAI, semiconductor lithography instruments link Sonoscan, acoustic imaging, wafer bonding inspection. Link Advanced Diamond Technologies, diamond film deposition, UNCD diamond, Link Rasco GmbH, testing equipment, a Cohu Inc. (Nasdaq: COHU) Link Multitest, a maker of test equipment, part of Dover, Link Moritex, machine vision and digital imaging products, link CMSF, Plures Technologies, Owner of Advanced MicroSensros Corp, magnetic sensor fab, Shrewsbury, MA Link Resonetics LLC, excimer laser MEMS processing tool, Link Surfx Technologies, atmospherical plasma technology, acquired by Precision Mechatronics in Nov 2011 3D Systems Corporation (NYSE:DDD) acquires Huntsman Corporation (NYSE:HUN)'s Digitalis resin MEMS platform for $41M, Nov 2011 Micronit MEMS division, design, prototyping and manufacturing of MEMS on glass Link Scannano, Deep vacuum gap (DVG) technology Link Schott, maker of thin glass wafer MEMpax Heidelberg Instruments, maker of table top lithography systems Link 4Wave, ion beam sputtering system, Link PVA TePla, system engineering company in hard-metal sintering, plasma processing, and crystal growing. Link Solid State Equipment LLC, single wafer wet processing and cleaning, Link USHIO, Japanese maker of optical systems, including steppers. Link MEMS Foundry: A complete list of MEMS foundries, Listed according to 2006 revenue

The first ten below are listed top ten by MEMS Investor Journal, Oct 14, 2010 Link PDF Backup Pure play MEMS foundries (MEMS only) IMT, Innovative Micro Technology (Santa Barbara), largest pure play MEMS foundry, through wafer via technology Link Asia-Pac Microsystems (APM) Hsinchu, Taiwan, Link Tyledyne Dalsa (Canada, near Montreal) Link (Teledyne acquired Dalsa for canadian dollar 341 million around Dec 22, 2010) Micralyne (Canada, near Edmonton) Link Success stories Silex Microsystems (Sweden, Boston, San Francisco) Link Unique Technology Colibrys, Switzerland and North America, manufacturer of motion sensors, and provider of foundry services Link Foundry MEMSCAP (formerly Microelectronics Center of North Carolina, MCNC) Link XFab mixed-signal foundry experts, Germany, Texas and Malaysia Link Tronics, Grenoble, Dallas, Link Touch Micro (founded 2004) Taoyuan, Taiwan, Link Advanced MicroSensors, owned by Plures and CMSF. Strewsbury, MA. Specializing in magnetoresistive sensors. Link Honeywell foundry Link Omron Foundry Link SONY Foundry Services, foundry customers include Knowles Electronics, $31M in 2011 Link Mixed mode foundry 2011 outlook ST Microelectronics, foundry with $228 revenue in 2010 for HP joint lab opened with China's Harbin Inst. of Tech in 2012 GlobalFoundries, Link TI foundry, one of the largest through joint collaborative efforts, customers include Lexmark, spin off from a former IBM ink jet division. MEMS Tech, Malaysia and Singapore, Link SVTC (development and commercialization services), Silicon Valley, Austin, Texas Link Laid off people in 2012 Texas Microfactory (Pilot scale production) Link Sensoror, Norway, $38M for 2011 Semefab, a new player, Link Tronics Group, MEMS foundary operating facilities in Grenoble, Dallas, Japan, Beijing Link Primary IC Manufacturing Foundries TSMC, taiwanese foundry specializing in electronics, enabling and leading the fabless semiconductor movement, founded 1987 by Morris Chang and ITRI, Link Wikipedia Hua Hong NEC, Shanghai, China, founded 1997 , Link Grace Semiconductor Manufacturing, 宏力, Shanghai, China, formed in 2000, Link MEMSmart, Suzhou Nano, Link Midwest MicroDevices, Ohio, USA, Link UMC, 聯電, Hsingchu, Taiway, Link CMOS-MEMS process 合舰科技, HJTC, subcidiary of UMC in China

Advanced Semiconductor Manufacturing Corporation, Shanghai, Link Semiconductor Manufacturing International, 中芯, China, SMIC, formed April 2000, Link Siware Systems, fabless semiconductor company focusing on custom ASIC and MEMS Link Asahi Kasei Microdevices (AKM), Tokyo, Japan, and San Jose, CA Link INO, Quebec, CANADA, link Jiangyin Changdian, 江阴长电封装 microelectronics packaging house in southern China 晶方科技 Suzhou WLCSP, microelectronics and camera chip packaging MEMS Product Vendors and "MEMS-inside" Products Component vendors: Newark electronics Link Digi-Key Link Robot Simple, a neat site that sells parts for building robots toys, including MEMS parts Link Projectors and TVs (InFocus, ) E-readers: Amazon Kindle, Barnes and Noble Nook Gaming machines: Nintendo Wii Consumer electronics: Apple iPod VectorNav, (Dallas, TX, founded 2008) GPA aided inertial navigation systems on chip Link Spirent, indoor positioning hybrid sensor fusion (see also Omron) Link Nike FuelBand, high end pedometer that use MEMS to count steps and color to provide feedback XSens motion tracking | X2Impact, helmet mount brain injury detector | Lifecomm LLC, watch for fall detection Runtastic Gmbh, smart phone apps for tracking exercise status | Tanita Corp, activity monitors | Polar Electro, activity monitors BodyMedia, body tracking | Motorola Mobilities, MotoACTV Organizations Transducer Research Foundations MANCEF: Micro and Nanotechnology Commercialization Education Foundation Link MEMS Industry Group Link MEPTEC: Microelectronics Packaging and Test Engineering Council Link IEEE: Institute of Electrical and Electronics Engineers ASME: American Society of Mechanical Engineers CINN,Chinese International NEMS Network, Link CSMNT: Chinese Society of Micro and Nanotechnology Link MEMS.net Link MEMS user community containing information about the field and various tools and applications SEMI, the global industry association serving the manufacturing supply chain for the micro- and nanoelectronics industries. Link VDI/VDE Innocvation, a German organization, Link Minalogic, a Grenoble, France company with many projects and clusters. Link MEMS Design Tools

Kic, a free graphic editor for MEMS layout L-Edit, by Tanner Research, for circuit design SoftMEMS Coventor, maker of CoverntorWare Synopsys, silicon multi die design tool, Link Noteworthy link to technical notes Packaging of three axis accelerometers Link Venture capital funding of semiconductor industry Link Where are MEMS found, a list of MEMS devices used in various industry sectors Link * If a company derives over 70% of revenue from one product, the company will listed in one category. If a company has two or three products that are roughly equal in revenue, the companies will be listed across two categories. If a company has more categories but none of the product is larger than 70%, the company will be listed under "large company or companies with multiple products".