Cleanroom Construction 20401067 H
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Cleanroom Construction...
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CORPORATE,SPECIFICATION, CLEAN ROOM MATERIALS OF CONSTRUCTION
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REVISION RECORD REV
ECO
DESCRIPTION
SUBMITTED
APP
A
WTP10369
Production Release
2/25/99
R. Reinisch
B
WTP10531
Updated Spec for FOF
9/06/00
R. Reinisch
C
ECR0043132
Released per ECR
05/06/05
P. Newby
D
ECR0051974
Corrected table formatting error on pg 14. No changes to content of document
10/20/05
P. Newby
E
ECR0056629
Removed Matrix, added testing expiration, added Appendix A, text corrections
03/21/06
P. Newby
F
ECR0061723
Add Section 4 CR Const. Exempt Mats., add review of EHS CSOP 109, correct HEPA/ULPA in Section 6.1.4, update attachments in Appendix A
06/28/06
P. Newby
G
ECR0066500
Removed references to Tooling/Equipment
09/08/06
P. Newby
H
ECR0089093
Added value for Other Compounds, Total Outgassing to Table 2; updates to Section 13.1 Flammability Acceptance Criteria; fixed page number/section number references; updated Appendix A: Construction Material Review to include Flammability Acceptance Criteria.
01/18/08
P. Newby
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Table of Contents 1 2 3 4 5 6 7 8 9 10 11 12 13 14
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PURPOSE .........................................................................................................3 SCOPE ..............................................................................................................3 ASSOCIATED DOCUMENTS ...........................................................................4 CLEANROOM CONSTRUCTION EXEMPT MATERIALS ................................5 SEAGATE APPROVED CONSTRUCTION MATERIALS .................................8 CONSTRUCTION MATERIAL REVIEW ...........................................................8 MATERIALS SUBMISSION PROCEDURE.......................................................9 FTIR ANALYSIS ..............................................................................................12 IONIC CONTAMINATION ...............................................................................12 DYNAMIC HEADSPACE OUTGASSING (DHS).............................................13 CORROSION ..................................................................................................15 ESD PROPERTIES .........................................................................................16 FIRE PROTECTION........................................................................................17 APPENDIX A ...................................................................................................18
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1 PURPOSE This specification establishes the test methods and acceptance criteria to determine the cleanliness level of materials used in clean room construction and renovation. Materials used for installing equipment, structural repairs or modifications of walls, floors and ceilings (like temporary polyethylene sheeting, or signs), must meet the acceptance criteria of this specification. Refer to Specification, Tapes / Labels, Cleanroom: 30825-001 for labels.
2 SCOPE To provide Seagate-wide methods for determining the cleanliness, outgassing, electrical, flammability, corrosion resistance and cleanability properties of materials, such as paint coatings, ceiling tiles, floor tiles, sealants, caulk, mastics, foams, gaskets, ducting, greases, lubricants, and metal surfaces for Seagate clean rooms; also applicable for plastics not in direct contact with disc drives or drive components. All adhesives used in the fabrication of assemblies used in construction of the cleanroom, for example in HEPA/ULPA equipment, must be in compliance to Seagate Specification 64902255 and must be evaluated for fitness of use at relevant conditions of temperature and humidity. All adhesives cured in the clean room must be individually approved in their specific application. Material Test Data Expiration The test data on the following materials expires from the last date tested: Material
Test data expiration
Adhesives, lubes, greases, mastics, foams, caulks, paints, sealants, tapes
4 years
Tiles, filters, metals, alloys, plastics, ducts, hardware
8 years
NOTE: This specification does not cover performance testing of clean room equipment, like HEPA filters or Filter Fan Units. A complete assembly of the clean room equipment must be delivered to the Project Manager for performance testing.
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3 ASSOCIATED DOCUMENTS 64902255
Corporate General Specification for Adhesives
81453598
Pole Tip Corrosion Audit
20800014-001
Method, WW Non-Volatile Residue and Silicone Oil Analysis
20800012-001
Spec, World Wide Method, Ionic Contamination Analysis Procedure
20800020-001
Method, WW Dynamic Headspace Outgassing
20800021-001
Specification, World Wide, Copper Wire Corrosion Test Method
20800032-001
Method, W/W Quantitative Analysis of Organic Contamination
30228-001
Spec, Supplier Packaging Standard
35367-001
HEPA Filter, Cleanroom
ST1027 EHS SOP 109
Life Safety and Fire Protection System Design and Installation
ANSI ESD-S7.1
Resistive Characterization of Floor Materials
ASTM E-84-07
Standard Test Method for Surface Burning Characteristics of Building Material
ASTM E-648-06a
Standard Test Method for Critical Radiant Flux of Floor-Covering Systems Using a Radiant Heat Energy Source
ASTM E-662-06
Standard Test Method for Specific Optical Density of Smoke Generated by Solid Materials
ASTM 1193 FM4910
Standard Specification for Reagent Water Cleanroom Materials Flammability Test Protocol
NFPA 253
Standard Method of Test for Critical Radiant Flux of Floor Covering Systems Using a Radiant Heat Energy Source
NFPA 255
Method of Test of Surface Burning Characteristics of Building Materials, National Fire Protection Association
UL 2360
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EOS/ESD Control Program Specifications
Test Methods for Determining the Combustibility Characteristics of Plastics Used in Semi-Conductor Tool Construction
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4 CLEANROOM CONSTRUCTION EXEMPT MATERIALS This list is exempt from cleanliness testing and applies to Facilities applications ONLY. Any of these materials used in production workstations or production equipment is subject to cleanliness and ESD specifications. Also, any of these materials used outside the production tool/workstation but in the moving air stream directly upstream of production tools/workstations is subject to Contamination engineering review.
4.1 METALS • Stainless Steel • Stainless Steel with Halar or Teflon coating • Copper pipe or tubing • Brass pipe or tubing • Galvanized steel • Anodized aluminum, in general, as used in construction materials Application: Galvanized steel is used in exhaust duct, occasionally for some limited framework. Located in sub-fab and maintenance chases not in the main cleanroom. Occasionally may be painted, but usually is left uncoated and exposed. Used to make up air duct, pipe support hangers, chilled water pipe, all-thread hanger rods, “Unistrut” pipe supports, air plenum dividers (below and above clean room envelop). All make up air handlers, transfer fans, etc. This material is the basic backbone of the air distribution and heating/ cooling piping system in cleanrooms. Restriction: Generally all the ductwork in the cleanroom is made of stainless steel - both for cosmetic and performance reasons. Any transition to other material should be made below the floor or in the maintenance chase.
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4.2 PLASTICS 4.2.1 Piping, Ducting and Tubing • PVC, CPVC, Corzan CPVC, UPVC Restriction: Cannot be used for DI Water supply or recirculation due to chloride leaching. Not for use in the cleanroom upstream of any process equipment or potential product. • CDA (Clean Dry Air) Chemtrol piping, Chem-Aire® • PVC Glues & Cements Restriction: Not for use in the cleanroom upstream of any process equipment or potential product. • PVDF (Polyvinylidene fluoride) Pipe & Fittings • Pheumatic control plastic tubing • ATS Duct Work Application: Used in most wash operations, plating, wet bench exhaust. ATS is a non combustible, chemical resistant duct specifically intended for exhaust ducting without sprinkler heads (‘without sprinkler heads’ is not approved in all government regulatory jurisdictions). This is the preferred type of duct for cleanrooms. The corrosion resistant interior liner consists of a synthetic veil and glass reinforcement and vinyl ester resin. The exterior is fabricated with fire resistant phenolic resin. Restriction: Can only be installed when not exposed to the "clean side" of the production space due to outgassing of resin. • Fiberglass Duct Work Application: Used in most wash operations, plating, wet bench exhaust. Used because of its corrosion resistance properties to convey a wide range of acid exhaust vapors. The option to this is lined steel exhaust duct, generally more expensive. The duct is installed below raised floor, interstitial space, or return air space. The exterior surface is a resin rich glass finish. Some manufacturers apply a paint coating. Restriction: Can only be installed when not exposed to the "clean side" of the production space due to outgassing of resin and Silicon Dioxide.
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4.2.2 Sheet Materials with a surface area < 144 square inches • Polycarbonate sheet material • Plastic stick on labels for identification • Phenolic engraved plates for equipment identification • Electrical cable insulation (IT, electrical power, control) • Plastic Face Plate of the Electrical power, lighting & IT points and it’s power points
4.3 ALL GLASS, QUARTZ, and CRYSTAL iTEMS 4.4 ASSEMBLIES/COMPONENTS • Light fixtures supplied as an integral part of cleanroom ceiling system • Panduit wire management components • Screws, nuts, bolts made of stainless steel, anodized aluminum, copper, brass, PP, PVC • Electrical components used in power distribution systems • Painted Cast Iron for Pump/motor assembly, CDA filters Restriction: Must be located where it will not be a contamination hazard to the process • Components used to install the Lighthouse CR Monitoring system Application: Applies to components external to the process tool • Emergency exit or direction signage
4.5 COATINGS • Powder Coated Surfaces Restriction: Surface areas of 250 square inches or less would be exempt while larger surface areas would require testing. • Baked Enamel Finishes (volatiles released during bake) Restriction: Surface areas of 250 square inches or less would be exempt while larger surface areas would require testing.
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5 SEAGATE APPROVED CONSTRUCTION MATERIALS Review the Approved Materials in the Lotus Notes database named: Cleanroom Construction Approved Materials (Contam\clnstuff.nsf - for internal Seagate access) or Cleanroom Construction Approved Material(CCAM) (for external supplier access). This database contains Materials and Test Data records for approved cleanroom construction materials. 1. Contact Corporate Facilities or the Site Project Manager for the URL to access this database. 2. If a Material is recorded and Approved, use that material. 3. If no records are found for the material, go to Section 6 to submit the material for approval, (process is summarized in the Flow Chart on pages 19-20) for use in a Seagate Cleanroom.
6 CONSTRUCTION MATERIAL REVIEW Refer to Appendix A for Cleanroom Construction Material Qualification Process Flowchart, and examples of Construction Material Review form, and Test Plan form.
6.1 Review the material’s Material Safety Data Sheet (MSDS) with the below Cleanroom Construction Material Categories • If the MSDS meets all the requirements below, go to Section 7. • If the MSDS does not meet all the requirements below, Do Not Use product. 6.1.1 Air ducting, electrical panel boards, switch boxes, lighting fixtures, conduits, and similar items. No exposed silicone sealants or silicone caulking compounds are permitted in clean rooms or in sealing of air ducting, electrical panel boards, switch boxes, lighting fixtures, conduits, and similar items. 6.1.2 Foams, tiles, gaskets, or molded plastics No flame retardants such as organobromines, organophosphates compounds, or asbestos are permitted in any foams, tiles, gaskets, or molded plastics used in the clean room. 6.1.3 Adhesives, sealants (especially compounds used to seal HEPA/ULPA filters in holding brackets) No organophosphates, organochlorophosphates (for example: tricresylphosphate) are permitted as flame retardants in any adhesives or sealants used in the clean room.
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6.1.4 HEPA and ULPA Filters No filter media or finished filters supplied to Seagate can be exposed to or challenged by phthalate esters (for example, DOP) at any time. 6.1.5 Tapes All electrical insulation tape must use an approved pressure sensitive adhesive as defined by Seagate Specification 64902255 and the level of outgassing products from the substrate tape must not exceed the acceptance criteria in Section 10.1 of this specification. 6.1.6 Two Dissimilar Metals If the sample is composed of two dissimilar metals in contact with one another, then perform aqueous rinse for ions by the extractable ions method defined in section 7. If the sample fails the requirements the part is rejected and further testing is unnecessary.
7 MATERIALS SUBMISSION PROCEDURE Refer to Appendix A for Cleanroom Construction Material Qualification Process Flowchart, and Cleanroom Construction Material Test Plan and Instructions. The Cleanroom Construction Material Test Plan is a matrix of the tests required arranged by Cleanroom Construction Material Category. The addresses and contacts for the correlated Testing Laboratories are also listed. The supplier of the material is responsible for sample submissions and paying the laboratory for the testing. Send softcopy (electronic files) test results as indicated on Test Plan form. The final authorities are the Site Contamination and ESD Engineers, who may require testing for any items that will come into the clean room.
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7.1 Guidelines for Submittal of Materials for Testing The area tested should represent the actual exposed surface of the construction material and should be representative of its application in the clean room.
7.2 Sample Submittal Routine Submitters should be aware that all sealants and adhesives are cured for 24 hours at room temperature prior to testing. Samples should be submitted by, or at the direction of, the relevant general contractor or sub-contractor, and be in compliance with section 5.1.3. Unless a vendor is under Supplier Quality Control, (per a Non-Disclosure Agreement filed with Seagate), all sealants and adhesives materials must be re-submitted despite prior approval of the material for cleanroom use.
7.3 Documentation Samples for testing must be submitted with a MSDS report and technical data sheet. A copy of the MSDS report is required for each carrier handling the shipment as well as for Customs. Three extra sets of the required documentation should be included. The cleanroom use application of the sample should be clearly identified. A bound set of the required documentation should be sent separately to the test laboratory manager and the designated Seagate Project Manager. In the case of stainless steel parts, vendor must supply certification of passivation or electropolishing treatment.
7.4 Traceability The sample manufacturer’s name, key contract, address and phone number should accompany the shipment along with lot number, expiration date, and instructions for use. No testing will be done without documentation indicating the traceability of the sample.
7.5 Sample Size A minimum 0.1 sq. ft (93 sq. cm., or 15 sq. inches) of sample size is required for outgassing (DHS) and solvent rinse (NVR) measurements. The actual sample size for DHS can be no smaller than 3.5 cm by 3.5 cm.
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7.6 Sample Preparation Samples of sealants, caulking materials, greases, lubricants, and paint coatings must be prepared by applying a thin film, on the dull side of a sheet of aluminum foil. Material
Amount
Surface area
sealant, caulking material
2 - 3 mm thick
3.5 cm by 3.5 cm
grease, lubricant, paint coating
min. 10 mg, +/- 1mg
3.5 cm by 3.5 cm
Spread sample using a single edge razor blade. The actual cured sample size must be 3.5 cm by 3.5 cm while the aluminum foil must be no smaller than 4.0 cm by 4.0 cm to allow the excess foil to be trimmed off without cutting into the test sample to avoid creating an exposed cut edge. Grease, lubricant and paint coating samples must be spread out as a thin film with a sample weight minimum of about 10 mg, +/- 1 mg.
7.7 Floor Tiles Six tiles of 2 ft x 2 ft size are required for electrical point-to-point resistance measurements of the free floor tiles per method ANSI ESD -S7.1. For testing of mounted tile samples, sufficient tile mastic must be supplied to bond the six tiles in a floor assembly for compliance with this Specification, and Specification ST1027. Samples of tile bead and adhesive must also be supplied for outgas testing.
7.8 Packaging and Handling of Samples Care must be taken to prevent accidental exposure of the test materials to external contamination from handling, shipping containers or packing materials to avoid cross contamination. The packing slip shall indicate quantities, vendor’s part number, and be readily visible to the receiver. Polyethylene bags for samples must be free of amides and silicones. Small samples must be packaged in glass vials with screw cap seals. All samples will be rinsed with DI water, or wiped down with IPA/DI water wetted wipes, to remove ionic contamination prior to testing at the lab. Aluminum foil can be used as packaging material for samples. Use the dull side of the aluminum foil to contact the sample.
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8 FTIR ANALYSIS Perform FTIR Analysis per 20800014-001 to detect siloxanes, amides, phthalate esters and flame retardants in the following general categories, but not limited to: Sealants, Caulking, Mastics, Adhesives (including tile beading) Grease, Lube, Signs, Polyethylene Sheeting, Paint Coating, Non-Metallic Ceiling Components, Gasket, Foams, Molded Plastics, HEPA & ULPA Filters, Plastics and Tapes
Metal, Alloys (panels, sheets), Dissimilar Metals
8.1 FTIR Acceptance Criteria Determine the level of siloxanes (silicones), amides and phthalates by Fourier Transform Infrared (FTIR). Siloxanes, amides and phthalate ester compounds shall not exceed 0.2 ug/cm2. Flame retardants are not permitted.
9 IONIC CONTAMINATION Use the method defined in Seagate Specification 20800012-001 for aqueous extraction of ions. In the following general categories, but not limited to: Sealants, Caulking, Mastics, Adhesives (including tile beading) Metal, Alloys Grease, Lube, Signs, Polyethylene Sheeting, Paint Coating, (panels, sheets), Non-Metallic Ceiling Components, Gasket, Foams, Molded Dissimilar Metals Plastics, HEPA & ULPA Filters, Plastics and Tapes
Floor Tile
Conduct this test at 80 +/- 5 ˚C for 1 hour. Minimum surface area required is 100 cm2. The volume of DI water used should be sufficient to submerge the sample with a minimum of 20 ml of DI water used for an extraction. The ratio of the volume of DI water used (in ml) to the total area (in cm2) of the parts extracted must be as close to one as possible.
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9.1
Ionic Contamination Acceptance Criteria Anions
Clean Room Material ug/cm2
Total Anions
≤ 0.20
Chloride
≤ 0.10
Sulfate
≤ 0.10
Bromide
≤ 0.10
Fluoride
≤ 0.10
Nitrate
≤ 0.10
Nitrite
≤ 0.10
Phosphate
≤ 0.10
Cations Ammonium
Clean Room Material ug/cm2 ≤ 0.20
TABLE 1: Maximum Acceptable Levels of Extractable Ions
10 DYNAMIC HEADSPACE OUTGASSING (DHS) Identification and quantitative analysis using Specification 20800020-001 Method, WW Dynamic Headspace Outgassing, in the following general categories, but not limited to: Sealants, Caulking, Mastics, Adhesives (including tile beading) Grease, Lube, Signs, Polyethylene Sheeting, Paint Coating, Non-Metallic Ceiling Components, Gasket, Foams, Molded Plastics, HEPA & ULPA Filters, Plastics and Tapes
Floor Tile
For Cleanroom Construction Materials, sample must be heated at 50˚C+/- 2˚C (122˚F +/- 5˚F) for 4 hours which represents worst case Cleanroom conditions.
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10.1 DHS Acceptance Criteria Outgassing products shall not exceed the limits shown below when tested per Seagate Specification 20800020-001. The acceptance criteria are reported in ng/cm2.
Controlled Chemicals
Teflon Jar ng/cm2
Sulfur Dioxide and Carbon Disulfide
≤ 15**
Siloxane
≤ 15
Amines (Tributylamine, N-phenyl benzenamine)
≤ 100
Ethyl Hexanol
≤ 1,000
Acrylic Acid and Methacrylic Acid
≤ 1,200
2-Phenyl 2-Propanol (Dimethyl Benzene Methanol)
≤ 4,000
Methacrylates/Alkyl Acrylates
≤ 1,100
(HEMA, IBOMA, HPMA, Octyl Acrylate)
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BHT
≤ 400
2- Ethyl Hexanoic Acid
≤ 250
Amides (Acrylamide)
≤ 20
Organo Sulfur Compounds (Benzothiazole) **
≤ 30
Caprolactam
≤ 1,500
Benzoic Acid
≤ 1,000
Acetophenone (DMAP, CHAP)
≤ 1,300
Polyglycol, Dimethacrylate (TGDMA, PhDMA)
≤ 3,000
Other Esters (DOP,DBP)
≤ 700
Dioctyl Sebacate
≤ 100
Sulfur
≤ 10**
Organometallics (Tributyltin Chloride)
≤ 10
Hydrocarbons
≤ 20,000
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Controlled Chemicals
Teflon Jar ng/cm2
Other Acids
≤ 1,250*
Alcohols, >C7
≤ 400*
Hydroxybenzenes
≤ 400*
Glycol Ethers
≤ 200
N-substituted Pyrrolidinone
≤ 100
Other Compounds
≤ 1000
Total Outgassing
≤ 40,000
TABLE 2: - Acceptance Criteria for Outgassing Note: The compounds in the table above are examples of organic chemical families. * Calculated to Hexadecane ** If levels of organosulfur compounds exceed 30 ng/cm2, then Seagate Specification 20800021-001 must be performed. If the test sample passes the copper stain test, then the part can be used in the clean room.
To use hexadecane as an internal standard, build calibration curves for controlled compounds using hexadecane (1,000 ng) as an internal standard on ChemStation Software. For compounds not controlled, assume hexadecane response factor of 1.
11 CORROSION All stainless steel parts, for example: screws, nuts, panels, or sheets, must be passivated or electropolished to prevent corrosion leading to the formation of rust particles. Passivation of free machining stainless steels is a difficult process, and may result in the formation of corrosive byproducts. The use of high Cr (Chromium), (>19%), stainless steels (such as DHS2 and SF20T) that contain Mo (Molybdenum), greatly improves corrosion resistance. These stainless steels have been demonstrated to meet the acceptance criteria of this specification.
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11.1 Pole Tip Corrosion Test For all RHO facilities, all nonmetal components that will come into contact with drive components, or are in the moving air stream, must be reviewed by the responsible Contamination Engineer as to need for 85˚C/85% RH testing per Process Number 81453598, Pole Tip Corrosion Audit. Those materials that require this 85˚C/85% RH testing must pass this test to be approved for use. Additionally, 85˚C/85% RH testing review of these materials is recommended for all process steps that involve exposed slider pole tips, including HSA and relevant HDA operations.
12 ESD PROPERTIES 12.1 Acceptance Criteria for Conductive and Static Dissipative Materials All non-metallic surfaces should be either conductive or dissipative. The electrical resistance of conductive non-metallic surfaces in electrostatic discharge sensitive areas shall be < 1 x 105 ohms per ST1027. The electrical resistance of static dissipative non-metallic surfaces in clean room applications shall be > 1 x 105 ohms and < 1 x 109 ohms per ST1027. Vendor must provide certification of compliance with the above requirements.
12.2 Acceptance Criteria for Conductive Floor Tiles The electrical resistance to a ground point must be measured using ANSI ESD S-7.1 Conductive flooring per Seagate Specification ST 1027 (EOS/ESD Control Program) is defined as having a resistance to a ground point of between 7.3 x 104 to 1.0 x 107 ohms.
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13 FIRE PROTECTION 13.1 Flammability Acceptance Criteria Cleanroom walls, ceilings and partitions as well as assemblies using adhesives, must have a Flame Spread Index (FSI) of 25 or less and a Smoke Density Index (SDI) of 50 or less when tested in accordance with ASTM E-84/NFPA 255. Cleanroom floor materials must have a Critical Radiant Flux of Class 1 when tested in accordance with ASTM E-648/NFPA 253 and a Smoke Density of 450 or less when tested in accordance with ASTM E-662. Per ASTM E-84/NFPA 255 Flame Spread Index
Smoke Density Index
Cleanroom walls, ceilings and partitions
≤ 25
≤ 50
Assemblies using adhesives
≤ 25
≤ 50
Critical Radiant Flux: Class 1 per ASTM E-648/NFPA 253
≤ 450 per ASTM E-662
Cleanroom floor
Flexible plastics used in cleanrooms as partitions for contamination control or other operational purposes must meet FM4910 or UL2360 standards for flammability and smoke generation requirements. Where FM4910 or UL2360 compliant materials are not suitable for the application, PC350 plastic sheets may be used. Where other materials are proposed for the application, a formal deviation request must be submitted for approval per CSOPEHS109. Supplier must provide applicable certification of compliance for the construction material per requirements stated above.
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13.2 CSOP 109 Review Materials and products used in Cleanroom construction must meet the requirements in EHS CSOP 109, Life Safety and Fire Protection System Design and Installation. Refer to Appendix A: Construction Material Review Matrix: form example, page 21.
14 APPENDIX A Cleanroom Construction Material Qualification Process: Flowchart, pages 19-20 • The general process flow for a new material qualification.
Construction Material Review Matrix: form example, page 21 • Initial set of questions about the new material to be answered before any testing is started.
Cleanroom Construction Test Plan & Instructions: form example, page 22 • Lists the required tests for new material, and the approved testing laboratories to use.
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SEAGATE CONFIDENTIAL
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Print Date:2012-Jan-5 19:29:15 CST Released; Prod Rel; H; 20401067 Seagate Confidential
CORPORATE,SPECIFICATION, CLEAN ROOM MATERIALS OF CONSTRUCTION
Doc Number: 20401067 Revision: H Sheet: 20 OF 22
Seagate Technology LLC
UN-FM
SEAGATE CONFIDENTIAL
1ST USE: All
Print Date:2012-Jan-5 19:29:15 CST Released; Prod Rel; H; 20401067 Seagate Confidential
CORPORATE,SPECIFICATION, CLEAN ROOM MATERIALS OF CONSTRUCTION
Doc Number: 20401067 Revision: H Sheet: 21 OF 22
Seagate Technology LLC
EXAMPLE
UN-FM
SEAGATE CONFIDENTIAL
1ST USE: All
Print Date:2012-Jan-5 19:29:15 CST Released; Prod Rel; H; 20401067 Seagate Confidential
CORPORATE,SPECIFICATION, CLEAN ROOM MATERIALS OF CONSTRUCTION
Doc Number: 20401067 Revision: H Sheet: 22 OF 22
Seagate Technology LLC
EXAMPLE
UN-FM
SEAGATE CONFIDENTIAL
1ST USE: All
Print Date:2012-Jan-5 19:29:15 CST Released; Prod Rel; H; 20401067 Seagate Confidential
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