AD898 Overhaul Part III_Rev C

AD898 Overhaul Manual-Part III

OVERHAUL MANUAL

AD898 AUTOMATIC DIE BONDER Part III Module Assembly

REFERENCE REVISION

: M164-O3 :C

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Ltd. All Rights Reserved.  Copyright 2007 ASM Assembly Automation Ltd.

THE INFORMATION HEREIN IS SUBJECT TO CHANGE WITHOUT PRIOR NOTICE i

AD898 Overhaul Manual-Part III

ASM Office (Worldwide) 全球業務及維修㆗心 Should you have any inquiry about machine setup/operation, please contact the ASM office nearest to your area  若㈲任何㈲關機器的設定或操作的查詢，請與你所在㆞最近的 ASM 辨事處聯絡。 for assistance. 若㈲任何㈲關機器的設定或操作的查詢，請與你所在㆞最近的 Hong Kong 香港 ASM ASSEMBLY AUTOMATION LTD 4/F Watson Centre, 16 Kung Yip Street Kwai Chung, Hong Kong

先進㉂動器材㈲限公司  香港葵涌工業街 16   號屈臣氏㆗心 4 樓 Tel Fax

: 852-2619 2000 : 852-2619 2118/9

China ㆗國  ASM MICROELECTRONICS TECHNICAL SERVICES (SHANGHAI) CO., LTD 2/F, No.55 Qing Yun Road, Shanghai Zhangjiang HiTech Park, Shanghai, China Post Code: 201203 Tel : 86-21-5080 5465 / 5080 5466 Fax : 86-21-5080 5467

先域微電子技術服務(㆖海)㈲限公司

上海市張江高科技園區青雲路 55 號二層

 郵編 : 201203 Tel Fax

: 86-21-5080 5465 / 5080 5466 : 86-21-5080 5467

Taiwan 台灣 ASM ASSEMBLY AUTOMATION (TAIWAN) BRANCH

 香港商先導㉂動器材㈲限公司

10F, No. 530, Sec.2, Chung Shan Road Chung Ho City, Taipei Hsien Taiwan, R.O.C.

 台北分公司  台北縣㆗和市㆗山路 2 段 530   號 10F Tel Fax

: 886-2-2227 3388 : 886-2-2227 3399

No. 4-2, East 3 Road Street N.E.P.Z. Kaohsiung Taiwan, R.O.C.

 高雄分公司  高雄市 811 楠梓加工出口區  東㆔街 4-2   號 Tel Fax

: 886-7-367 6300 : 886-7-367 6399

2/F, No. 9, Lane 379, Sec 1 Ching Kuo Road Hsin-Chu, Taiwan, R.O.C.

 ASM MICROELECTRONICS TECHNICAL SERVICES (SHANGHAI) CO., LTD Suzhou Branch Office Block A, #05-03/06, No.5 Xing Han Street, Suzhou Industrial Park, Suzhou, China Post Code: 215021

 新竹分公司  新竹市 300 經國路 ㆒段 379 巷   號 9 2 樓

蘇州市蘇州工業園星漢街五號 A 幢 05-03/06 室

 台㆗分公司

先域微電子技術服務(㆖海)㈲限公司   蘇州分公司  郵編 : 215021

Tel : 0512-67626278 Fax: 0512- 67626378 ASM MICROELECTRONICS TECHNICAL SERVICES (SHANGHAI) CO., LTD Shenzhen Branch Office 7/F, Asia Light Building, West Wing No. 8, TaiRan Road 8, Block 503 TaiRan Industry & Commerce Zone, Chegong Temple FuTian District, Shenzhen, China ) 先域微電子技術服務(㆖海 ㈲限公司  ㆗國 深圳市 福田區 深圳市 福田區 車公廟  車公廟 泰然工貿園 泰然 8 8 503 棟 亞芳大廈   路   號  棟 亞芳大廈 7 樓 西翼  樓 西翼  郵編 : 518040 Tel : 86-755-8344 6365 Fax : 86-755-8344 6245 ASM MICROELECTRONICS TECHNICAL SERVICES(SHANGHAI) CO.,LTD DONG GUAN OFFICE Zhang Mu Tou Town, Dong Guan City, China 先域微電子技術服務(㆖海 ㈲限公司 )

 東莞辦事處  ㆗國東莞市樟㈭頭鎮東深公路大道 泰安廣場 A 棟㆕樓 A9,A10,A11  電話: 86-769-7125600,  傳真: 86-769-7125601

ii

Tel Fax

: 886-3-543 1500 : 886-3-543 1555

8F-1, NO. 135, Sec 2 Chung-Shan Rd, Tantzu Taichung, Taiwan R.O.C. Tel : 886-4-2535 6390 Fax : 886-4-2535 6820 Europe   歐洲 ASM ASSEMBLY PRODUCTS B.V. Jan van Eycklaan 10 3723 BC Bilthoven The Netherlands Tel : 31-30-229 8411 Fax : 31-30-225 0584 U.S.A. 美國 ASM PACIFIC ASSEMBLY PRODUCTS INC. 3440 East University Drive, Phoenix Arizona 85034-7200, U.S.A. Tel : 1-602-437 4760 Fax : 1-602-437 4630 West Regional Office 97 East Brokaw Road, Suite 100, San Jose California 95112-4209, U.S.A. Tel : 1-408-451 0800 Fax : 1-408-451 0808

Singapore 新加坡 ASM TECHNOLOGY SINGAPORE PTE LTD 2 Yishun Avenue 7 Singapore 768924 Tel : 65-6752 6311 Fax : 65-6758 2287 Malaysia 馬來西亞 ASM ASSEMBLY EQUIPMENT MALAYSIA SDN. BHD. Bayan Point, Block A, No: 15-1-23 Medan Kampung Relau, 11900 Penang, Malaysia Tel : 60-4-644 9490 Fax : 60-4-645 1294 ASM MUAR 17 Tingkat Satu, Jalan Mulia Satu Taman Sri Mulia, Sungai Abong 84000, Muar, Johor, Malaysia Tel : 60-6-951 5713 Fax : 60-6-951 5786 Thailand 泰國 ASM ASSEMBLY EQUIPMENT BANGKOK LTD. 51/3, Vibhavadi Tower, 18/2 Floor  Ngamwongwan Road, Ladyao, Chathuchak, Bangkok 10900 Thailand Tel : 66-2-941 3181/2 Fax : 66-2-941 3183 Japan ㈰本 ASM ASSEMBLY TECHNOLOGY CO LTD 5F, Tachikawa F-Bldg, 1-7-18, Nishiki-cho Tachikawa-shi, Tokyo 196-0022, Japan Tel : 81-42-521-7751 Fax : 81-42-521-7750 Korea   韓國 ZEMOS KOREA INC./ ASM PACIFIC KOR LTD 3F, 628-6, Deung Chon Dong Kangseo Gu, Seoul, 157-030, Korea Tel : 82-2-538 5900 Fax : 82-2-561 5905 ASM PACIFIC KOR LTD. Rm501, 5F., Hi-Tech Center, 958-14 Daechon-dong, Buk-gu, Gwangju 500-470, KOREA Tel : 82-62-973 4174 Fax : 82-62-973 4216 Philippines 菲律賓 CAPITAL EQUIPMENT DISTRIBUTION LTD 2108 Prime Street Corner Enterprise Street Madrigal Business Park Alabang, Muntinlupa City Philippines 1770 Tel : 63-2-850 4543 Fax : 63-2-850 4547

AD898 Overhaul Manual-Part III

ASM Office (Worldwide) 全球業務及維修㆗心 Should you have any inquiry about machine setup/operation, please contact the ASM office nearest to your area  若㈲任何㈲關機器的設定或操作的查詢，請與你所在㆞最近的 ASM 辨事處聯絡。 for assistance. 若㈲任何㈲關機器的設定或操作的查詢，請與你所在㆞最近的 Hong Kong 香港 ASM ASSEMBLY AUTOMATION LTD 4/F Watson Centre, 16 Kung Yip Street Kwai Chung, Hong Kong

先進㉂動器材㈲限公司  香港葵涌工業街 16   號屈臣氏㆗心 4 樓 Tel Fax

: 852-2619 2000 : 852-2619 2118/9

China ㆗國  ASM MICROELECTRONICS TECHNICAL SERVICES (SHANGHAI) CO., LTD 2/F, No.55 Qing Yun Road, Shanghai Zhangjiang HiTech Park, Shanghai, China Post Code: 201203 Tel : 86-21-5080 5465 / 5080 5466 Fax : 86-21-5080 5467

先域微電子技術服務(㆖海)㈲限公司

上海市張江高科技園區青雲路 55 號二層

 郵編 : 201203 Tel Fax

: 86-21-5080 5465 / 5080 5466 : 86-21-5080 5467

Taiwan 台灣 ASM ASSEMBLY AUTOMATION (TAIWAN) BRANCH

 香港商先導㉂動器材㈲限公司

10F, No. 530, Sec.2, Chung Shan Road Chung Ho City, Taipei Hsien Taiwan, R.O.C.

 台北分公司  台北縣㆗和市㆗山路 2 段 530   號 10F Tel Fax

: 886-2-2227 3388 : 886-2-2227 3399

No. 4-2, East 3 Road Street N.E.P.Z. Kaohsiung Taiwan, R.O.C.

 高雄分公司  高雄市 811 楠梓加工出口區  東㆔街 4-2   號 Tel Fax

: 886-7-367 6300 : 886-7-367 6399

2/F, No. 9, Lane 379, Sec 1 Ching Kuo Road Hsin-Chu, Taiwan, R.O.C.

 ASM MICROELECTRONICS TECHNICAL SERVICES (SHANGHAI) CO., LTD Suzhou Branch Office Block A, #05-03/06, No.5 Xing Han Street, Suzhou Industrial Park, Suzhou, China Post Code: 215021

 新竹分公司  新竹市 300 經國路 ㆒段 379 巷   號 9 2 樓

蘇州市蘇州工業園星漢街五號 A 幢 05-03/06 室

 台㆗分公司

先域微電子技術服務(㆖海)㈲限公司   蘇州分公司  郵編 : 215021

Tel : 0512-67626278 Fax: 0512- 67626378 ASM MICROELECTRONICS TECHNICAL SERVICES (SHANGHAI) CO., LTD Shenzhen Branch Office 7/F, Asia Light Building, West Wing No. 8, TaiRan Road 8, Block 503 TaiRan Industry & Commerce Zone, Chegong Temple FuTian District, Shenzhen, China ) 先域微電子技術服務(㆖海 ㈲限公司  ㆗國 深圳市 福田區 深圳市 福田區 車公廟  車公廟 泰然工貿園 泰然 8 8 503 棟 亞芳大廈   路   號  棟 亞芳大廈 7 樓 西翼  樓 西翼  郵編 : 518040 Tel : 86-755-8344 6365 Fax : 86-755-8344 6245 ASM MICROELECTRONICS TECHNICAL SERVICES(SHANGHAI) CO.,LTD DONG GUAN OFFICE Zhang Mu Tou Town, Dong Guan City, China 先域微電子技術服務(㆖海 ㈲限公司 )

 東莞辦事處  ㆗國東莞市樟㈭頭鎮東深公路大道 泰安廣場 A 棟㆕樓 A9,A10,A11  電話: 86-769-7125600,  傳真: 86-769-7125601

ii

Tel Fax

: 886-3-543 1500 : 886-3-543 1555

8F-1, NO. 135, Sec 2 Chung-Shan Rd, Tantzu Taichung, Taiwan R.O.C. Tel : 886-4-2535 6390 Fax : 886-4-2535 6820 Europe   歐洲 ASM ASSEMBLY PRODUCTS B.V. Jan van Eycklaan 10 3723 BC Bilthoven The Netherlands Tel : 31-30-229 8411 Fax : 31-30-225 0584 U.S.A. 美國 ASM PACIFIC ASSEMBLY PRODUCTS INC. 3440 East University Drive, Phoenix Arizona 85034-7200, U.S.A. Tel : 1-602-437 4760 Fax : 1-602-437 4630 West Regional Office 97 East Brokaw Road, Suite 100, San Jose California 95112-4209, U.S.A. Tel : 1-408-451 0800 Fax : 1-408-451 0808

Singapore 新加坡 ASM TECHNOLOGY SINGAPORE PTE LTD 2 Yishun Avenue 7 Singapore 768924 Tel : 65-6752 6311 Fax : 65-6758 2287 Malaysia 馬來西亞 ASM ASSEMBLY EQUIPMENT MALAYSIA SDN. BHD. Bayan Point, Block A, No: 15-1-23 Medan Kampung Relau, 11900 Penang, Malaysia Tel : 60-4-644 9490 Fax : 60-4-645 1294 ASM MUAR 17 Tingkat Satu, Jalan Mulia Satu Taman Sri Mulia, Sungai Abong 84000, Muar, Johor, Malaysia Tel : 60-6-951 5713 Fax : 60-6-951 5786 Thailand 泰國 ASM ASSEMBLY EQUIPMENT BANGKOK LTD. 51/3, Vibhavadi Tower, 18/2 Floor  Ngamwongwan Road, Ladyao, Chathuchak, Bangkok 10900 Thailand Tel : 66-2-941 3181/2 Fax : 66-2-941 3183 Japan ㈰本 ASM ASSEMBLY TECHNOLOGY CO LTD 5F, Tachikawa F-Bldg, 1-7-18, Nishiki-cho Tachikawa-shi, Tokyo 196-0022, Japan Tel : 81-42-521-7751 Fax : 81-42-521-7750 Korea   韓國 ZEMOS KOREA INC./ ASM PACIFIC KOR LTD 3F, 628-6, Deung Chon Dong Kangseo Gu, Seoul, 157-030, Korea Tel : 82-2-538 5900 Fax : 82-2-561 5905 ASM PACIFIC KOR LTD. Rm501, 5F., Hi-Tech Center, 958-14 Daechon-dong, Buk-gu, Gwangju 500-470, KOREA Tel : 82-62-973 4174 Fax : 82-62-973 4216 Philippines 菲律賓 CAPITAL EQUIPMENT DISTRIBUTION LTD 2108 Prime Street Corner Enterprise Street Madrigal Business Park Alabang, Muntinlupa City Philippines 1770 Tel : 63-2-850 4543 Fax : 63-2-850 4547

AD898 Overhaul Manual-Part III

Table Of Contents

CHAPTER 1

INTRODUCTION....................................................................... 1-1

1.1

 AD898 Main Module List ............................................. ........................................................................................ ............................................. .. 1-1

1.2

Overhaul Flowchart ......................................... ................................................................................... ........................................................ .............. 1-2

CHAPTER 2 2.1

MODULE ASSEMBLY ................................................................ 2-1 Bond Head Table ................................. ......................................................................... ................................................................... ........................... 2-1

2.1.1

Bond Head Specification Check Check List List .................................................................................. 2-1

2.1.2

Bondhead Table Assembly.................................................................................................2-2

2.2

Bond Optic Table ........................................ ................................................................................... .......................................................... ............... 2-10 2.2.1

Bond Optic table Specification Check List........................................................................2-10

2.2.2

Bond Optic Table Assembly..............................................................................................2-10

2.3

Workholder .......................................................................................................... 2-15 2.3.1

Workholder Specificaitons Check List .............................................................................. 2-15

2.3.2

Workholder Assembly ................................................................................ ....................... 2-15

2.4

Epoxy Table ......................................................................................................... 2-27 2.4.1

Epoxy Writer Table Specification Check List....................................................................2-27

2.4.2

Epoxy Writer Assembly.....................................................................................................2-27

2.5

Ejector................................................................................................................. 2-32 2.5.1

Ejector Specification Check List ....................................................................................... 2-32

2.5.2

Multiple Ejector Assembly.................................................................................................2-32

2.6

Wafer Table ......................................................................................................... 2-42 2.6.1

Wafer Table Specification Check List...............................................................................2-42

2.6.2

Wafer Table Assembly......................................................................................................2-42

2.7

Wafer Ring Assembly (8” Wafer Ring)..................................................................... 2-45 2.7.1

Wafer Ring Specifications Check List...............................................................................2-45

2.7.2

Wafer Ring Assembly ......................................................................................... ..............2-45

2.8

Wafer Expander Assembly ..................................................................................... 2-48 2.8.1

Wafer Expander Specifications Check List.......................................................................2-48

2.8.2

8 inches wafer expander assembly procedures ............................................................... 2-48

2.9

Leadframe Loader................................................................................................. 2-51 2.9.1

Leadframe Loader Specification Check List.....................................................................2-51

2.9.2

Leadframe Loader Assembly............................................................................................2-51

2.10

Stack Loader ........................................................................................................ 2-54

CHAPTER 3

TOOL LIST ............................................................................. 3-1

CHAPTER 4

GREASE AND LUBRICANT......................................................... 4-1

4.1

Tools for Preventive Maintenance... .................................................. .......................................................................... ........................ 4-2

i

AD898 Overhaul Manual-Part III

CHAPTER 5

LOCTITE AND WHERE TO USE .................................................. 5-2

CHAPTER 6

STANDARD LM GUIDE/CROSS ROLLER WAY ASSEMBLY .............. 6-2

6.1

Cross Roller Way..................................................................................................... 6-2

6.2

LM Guide ............................................................................................................... 6-5

6.3

 A/C Bearing............................................................................................................ 6-7

6.4

Ballscrew ............................................................................................................... 6-9

6.5

Timing Belt........................................................................................................... 6-11

6.6

Coupling .............................................................................................................. 6-12

CHAPTER 7

VOICE COIL & LINEAR MOTOR RESISTANCE .............................. 7-1

CHAPTER 8

SCREW USAGES AND REQUIREMENTS ....................................... 8-1

ii

AD898 Overhaul Manual-Part III Revision History Record

Revision History Record Revision

Revision Description

A

Initial Release

B

Add tools and grease/ oil pictures

C

Update the procedure and pictures on Ch2 and add voice coil and linear motor resistance on Ch7

Amended Section

Ch3, Ch4 & Ch5 Ch2 & Ch7

i

AD898 Overhaul Manual Ch1 – Introduction

Chapter 1

Introduction

Overhaul is a part of Machine Preventive Maintenance which refers to thorough examination followed by any necessary repairs. The need of overhaul mainly depends on machine utilization, requirements, operating condition and etc. In general, it could be done when the machine has been servicing for long time. It includes dismantle and assembly of main modules or the whole machine. This manual shows the overhaul procedures of main machine modules.

1.1 • • • • • • • • • • •

AD898 Main Module List  Bondhead Table Bond Optic Table Wafer Optic Table Workholder  Epoxy Writer Table Ejector Table Wafer Table Wafer Expander  Wafer Loader  Stack Loader  Leadframe Loader 

Epoxy Writer  Table

Stack  Loader 

Bond Head

Ejector  Table

Wafer  Expander 

Part III 1-1

AD898 Overhaul Manual Ch1 – Introduction

1.2

Overhaul Flowchart 

Below flowchart gives the general procedure of overhauling AD898.

Design the overhaul plan

Are all the spare parts and tools ready?

 No

Order necessary  parts and tools

Yes AD898/AD8912 Key modules for overhaul 2.1 • Bondhead Table 2.2 • Bond Optic Table • Wafer Optic Table • Workholder 2.3 2.4 • Epoxy Table 2.5 • Ejector 2.6 • Wafer Table 2.7 • Wafer Ring 2.8 • Wafer Expander • Wafer Loader  2.9 • Leadframe Loader 2.10 • Stackloader

Check the key parts of modules and sub-modules and see if repair or  replacement is needed

Perform modules disassembly, parts replacement and assembly

Is there any other module for  overhaul?

Yes

 No Machine integration and module alignment *Please re er to Intermediate Machine Setu Manual 

Device setup for bonding quality check  *Please refer to Operation Manual 

End

Part III 1-2

AD898 Overhaul Manual Ch2 – Module Assembly

Chapter 2

Module Assembly

2.1

Bond Head Table Bond Head Specification Check List 2.1.1 Item Description Specification/requirement Y axis LM Guide Note: Use THK AFF Grease 1 Y LM Guide parallelism